Lapping & Polishing Carriers

Lapping & Polishing Carriers
Products available => Inserted Lapping Carriers
  1. For the wafer sizes 450mm, 300mm, 200mm, 150mm & 125mm.
  2. Various carrier sizes up to 32B
  3. Various thickness of 0.340mm~1.270mm
  4. Injection molded High Resistance Insert
  5. Steel strips: SK85, C75S, C100S
Standard Specification
Wafer size Carrier size Number of wafer hole Thickness (mm) Remark
450mm (18") 32B 1 hole 1.000 Metal, Prototype
300mm (12") 32B 4 holes 0.750 - 0.800 Insert
28B 3 holes 0.750 - 0.800
20B 1 hole 0.660 - 0.800
0.430 - 1.270 Metal
200mm (8") AC 1400 4 holes 0.660 - 0.780 Insert
AC 1500 5 holes 0.660 - 0.780
20B 3 holes 0.660 - 0.7800
22B 4 holes 0.660 - 0.780
24B 5 holes 0.660 - 0.780
28B 6-8 holes 0.720 - 0.800
32B 6-8 holes 0.720 - 0.800
AC 1400 4 holes 0.430 - 1.270 Metal
AC1500 5 holes 0.430 - 0.780
20B 3 holes 0.430 - 1.270
22B 4 holes 0.430 - 1.270
24B 5 holes 0.460 - 0.800
28B 6-8 holes 0.720 - 0.800
32B 6-8 holes 0.720 - 0.800
150mm (6") 14B 3 holes 0.340 - 0.720 Insert
16B 4 holes 0.340 - 0.720
AC1200 4-5holes 0.340 - 0.720
AC1400 8holes 0.430 - 0.720
20B 7holes 0.430 - 0.720
22B 7-8holes 0.430 - 0.720
24B 9holes 0.460 - 0.720
30B 10holes 0.720 , 1.000
14B 3holes 0.340 - 1.270 Metal
16B 4holes 0.340 - 1.270
AC1200 4-5 holes 0.340 - 1.270
AC1400 8holes 0.430 - 1.270
20B 7holes 0.430 - 1.270
22B 7-8holes 0.430 - 1.270
24B 9holes
30B 10holes 0.720 - 0.800
125mm (5") 16B 7holes 0.430 - 0.560 Insert
20B 9holes 0.430 - 0.560
22B 10holes 0.430 - 0.560
16B 7holes 0.340 - 1.270 Metal
20B 9holes
22B 10holes 0.430 - 1.270
100mm (4") 15B 8-9holes 0.340 - 1.270 Metal
16B 8-9holes 0.340 - 1.270
20B 15holes 0.340 - 1.270
Lapping & Polishing Carriers
Lapping & Polishing Carriers
=> Inserted Polishing Carrier
  1. Application : 200mm and 300mm Wafer Polishing
  2. Polished, DLC Coated, Titanium as per Customer’s requirement
  3. Injection molded High Resistance Insert
  4. Various grades of insert materials
  5. Substrate Material : SUS, Titanium
  6. Thickness : 0.7mm ~ 0.8mm
  7. Thickness Tolerance : ± 2um

Further details as per customer’s requirements

=> DCL Coated Polishing Carrier
  1. Application : 200mm and 300mm Wafer Polishing
  2. Injection molded High Resistance Insert
  3. Range of insert width (Concentricity) ≤ 0.2mm
  4. Substrate Material : SUS Steel (Hardness : Hv 450~550)
  5. Carrier Thickness : 0.750mm ~ 0.800mm ± 2 um
  6. DLC Coating Thickness : 2.5 um ± 1 um
  7. Flatness : ≤ 500 um

Further details as per customer’s requirements

Lapping & Polishing Carriers
Lapping & Polishing Carriers
Lapping & Polishing Carriers
Lapping & Polishing Carriers
Lapping & Polishing Carriers